![Method and apparatus for magnetic focusing of off-axis electron beam](/abs-image/US/2004/01/15/US20040007959A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: Method and apparatus for magnetic focusing of off-axis electron beam
- 专利标题(中):离轴电子束磁聚焦的方法和装置
- 申请号:US10192772 申请日:2002-07-09
- 公开(公告)号:US20040007959A1 公开(公告)日:2004-01-15
- 发明人: Mark J. Cattelino , Fred I. Friedlander
- 申请人: Communications and Power Industries, Inc., a Delaware Corporation
- 申请人地址: null
- 专利权人: Communications and Power Industries, Inc., a Delaware Corporation
- 当前专利权人: Communications and Power Industries, Inc., a Delaware Corporation
- 当前专利权人地址: null
- 主分类号: H01J029/46
- IPC分类号: H01J029/46
摘要:
Axially symmetric magnetic fields are provided about the longitudinal axis of each beam of a multi-beam electron beam device. The magnetic field symmetry is independent of beam voltage, beam current and applied magnetic field strength. A flux equalizer assembly is disposed between the cathodes and the anodes and near the cathodes of a multi-beam electron beam device. The assembly includes a ferromagnetic flux plate completely contained within the magnetic focusing circuit of the device. The flux plate includes apertures for each beam of the multi-beam device. A flux equalization gap or gaps are disposed in the flux plate to provide a perturbation in the magnetic field in the flux plate which counters the asymmetry induced by the off-axis position of the beam. The gaps may be implemented in a number of ways all of which have the effect of producing a locally continuously varying reluctance that locally counters the magnetic field asymmetry. The flux equalizer assembly prevents or substantially reduces beam twist and maintains all of the electron beams of the device as linear beams.
摘要(中):
围绕多光束电子束装置的每个光束的纵向轴线提供轴向对称的磁场。 磁场对称性与束电压,束电流和施加的磁场强度无关。 通量均衡器组件设置在阴极和阳极之间以及多束电子束装置的阴极附近。 组件包括完全包含在装置的磁聚焦电路内的铁磁通量板。 磁通板包括用于多光束装置的每个光束的孔。 磁通平衡间隙或间隙设置在磁通板中,以在磁通板中的磁场中产生扰动,其反映由波束的离轴位置引起的不对称性。 间隙可以以多种方式实现,其中所有这些都具有产生局部连续变化的磁阻的作用,其局部地反映磁场不对称性。 通量均衡器组件防止或基本上减少光束扭曲,并将器件的所有电子束保持为线性光束。