基本信息:
- 专利标题： 加速度感知裝置 ACCELERATION SENSOR DEVICE
- 专利标题（英）：Acceleration sensor device
- 专利标题（中）：加速度感知设备 ACCELERATION SENSOR DEVICE
- 申请号：TW094136702 申请日：2005-10-20
- 公开(公告)号：TWI266878B 公开(公告)日：2006-11-21
- 发明人： 口勇夫 SAKAGUCHI, ISAO
- 申请人： 日立金屬股份有限公司 HITACHI METALS, LTD.
- 申请人地址： 日本
- 专利权人： 日立金屬股份有限公司 HITACHI METALS, LTD.
- 当前专利权人： 日立金屬股份有限公司 HITACHI METALS, LTD.
- 当前专利权人地址： 日本
- 代理人： 林志剛
- 优先权： 日本 2004-323761 20041108
- 主分类号： G01P
- IPC分类号： G01P
An acceleration sensor having an acceleration sensor chip that has a mass portion, a supporting frame, and a flexible arm provided with a piezoelectric resistor element on its upper surface, and also having an upper regulation plate that is bonded to the upper surface of the support frame, that has an IC circuit, and that has a larger area than the support frame. The acceleration sensor chip and the upper regulation plate are encased in a protective case with a cover. The regulation plate projects from the outer wall of the support frame and closes the space in the protective case containing the chip to block air flow between the above and below the regulation plate, and as a result, a temperature rise by the IC circuit is uniform between the piezoelectric resistor elements, provided on the upper surface of the flexible arm, and offset voltage is reduced.
公开/授权文献:
- TW200624811A 加速度感知裝置 ACCELERATION SENSOR DEVICE 公开/授权日：2006-07-16