基本信息:
- 专利标题: 電氣耦合機械式帶通濾波器
- 专利标题(英):Electrically-coupled mechanical band-pass filter
- 专利标题(中):电气耦合机械式带通滤波器
- 申请号:TW091111267 申请日:2002-05-28
- 公开(公告)号:TW569528B 公开(公告)日:2004-01-01
- 发明人: 卡爾P 陶西格 CARL P. TAUSSIG
- 申请人: 惠普公司 HEWLETT-PACKARD COMPANY
- 申请人地址: 美國
- 专利权人: 惠普公司 HEWLETT-PACKARD COMPANY
- 当前专利权人: 惠普公司 HEWLETT-PACKARD COMPANY
- 当前专利权人地址: 美國
- 代理人: 惲軼群; 陳文郎
- 优先权: 美國 09/896,472 20010629
- 主分类号: H03H
- IPC分类号: H03H
The present invention provides an electromechanical band-pass filter for use in PIRM memory arrays. The system of the present invention utilizes electrostatically coupled micro-resonators as filters, implementing micro electromechanical systems (MEMS) technology in which large numbers of miniature micro-movers are fabricated on a single substrate. The system of the present invention provides a narrow band-pass filter having a sharp frequency roll-off, typically 40 db per decade, and very high impedance that can be implemented in a simple, low temperature, inexpensive process not involving integrated circuitry. An electronically-coupled, mechanical band-pass filter fabricated on a substrate (36) includes first and second masses (32, 38), each mass being independently movable in a common direction relative to the substrate (36) and to other mass. A first spring element (33) has one end attached to the substrate (36) and the other end attached to the first mass (32). A second spring element (39) has one end attached to the first mass (32) and the other end attached to the second mass (38). An input transducer (40, 42) is provided for receiving an input frequency and applying a force to the first mass (32) in the direction of motion of the first mass (32), the force being representative of the input frequency. An output transducer (48, 49) is associated with the first and second masses (32, 38) for providing an output frequency representative of the relative motion between the first and second masses (32, 38).