基本信息:
- 专利标题： 半導體製造檢查裝置及半導體裝置
- 专利标题（英）：Semiconductor manufacturing-and-inspection system, and semiconductor device
- 专利标题（中）：半导体制造检查设备及半导体设备
- 申请号：TW090118021 申请日：2001-07-24
- 公开(公告)号：TW521362B 公开(公告)日：2003-02-21
- 发明人： 橋本修
- 申请人： 三菱電機股份有限公司
- 申请人地址： 日本
- 专利权人： 三菱電機股份有限公司
- 当前专利权人： 三菱電機股份有限公司
- 当前专利权人地址： 日本
- 代理人： 賴經臣
- 优先权： 日本 2000-366944 20001201
- 主分类号： G01R
- IPC分类号： G01R ; H01L
本發明之半導體製造檢查裝置的解決手段，係對載置於老化測試基板1上的多數區域4、5的半導體裝置3，利用老化測試裝置2執行測試，其具有：驅動器8、7，用來對多數區域4、5的半導體裝置3分別供應驅動訊號；延遲電路6，對應來自該驅動器8、7的多數驅動訊號的一方而裝設，且可使該一方驅動訊號相對另一方的驅動訊號延遲；以及驅動器9，用來控制該延遲電路6的延遲動作。
The peak of the current dissipated by semiconductor devices is dispersed and suppressed to a level below the current supply capability of a burn-in apparatus. As a result, there is obtained a semiconductor manufacturing-and-inspection apparatus which enables easy performance of a burn-in test without involvement of anomalies arising in the burn-in apparatus or limitations on the number of semiconductor devices mounted on the burn-in board. A semiconductor manufacturing-and-inspection system, which tests semiconductor devices provided in a plurality of areas on a burn-in board through use of a burn-in apparatus, includes a driver for supplying a drive signal to the semiconductor devices provided in the plurality of areas, a delay circuit which is provided for one of a plurality of drive signals output from the signal generation apparatus and delays the drive signal relative to the other drive signal; and a driver for controlling the delaying operation of the delay apparatus.