基本信息:
- 专利标题: 用於處理全氟化合物之介電層放電裝置及模組
- 专利标题(英):Dielectric barrier discharge apparatus and module for perfluorocompounds abatement
- 专利标题(中):用于处理全氟化合物之介电层放电设备及模块
- 申请号:TW090131747 申请日:2001-12-20
- 公开(公告)号:TW497986B 公开(公告)日:2002-08-11
- 发明人: 邱信夫 , 呂建豪 , 游生任
- 申请人: 財團法人工業技術研究院
- 申请人地址: 新竹縣竹東鎮中興路四段一九五號
- 专利权人: 財團法人工業技術研究院
- 当前专利权人: 財團法人工業技術研究院
- 当前专利权人地址: 新竹縣竹東鎮中興路四段一九五號
- 主分类号: B01D
- IPC分类号: B01D
A dielectric barrier discharge apparatus and module for perfluorocompounds (PFCs) abatement are disclosed. The dielectric barrier discharge apparatus includes a housing, a first dielectric tube disposed in the housing, a second dielectric tube disposed in the first dielectric tube, and at least one electrode disposed in the housing. By this arrangement, a first cooling gas passage is formed between the housing and the first dielectric tube, a PFCs passage is formed between the first and second dielectric tubes, and a second cooling gas passage is formed in the second dielectric tube. While the applied voltage for the electrodes is greater than a breakdown voltage, high energetic electrons generated in the PFCs passage can ionize or dissociate the PFCs further to be removed. Meanwhile, a cooling gas is introduced to the cooling gas passage for cooling the electrodes. A dielectric barrier discharge module composed of a plurality of dielectric barrier discharge apparatuses is provided to promote the capacity of the treatment of PFCs gases.