基本信息:
- 专利标题： 光硬化性組成物、圖案形成方法及元件的製造方法
- 专利标题（英）：Photocurable composition, pattern forming method and method for manufacturing device
- 专利标题（中）：光硬化性组成物、图案形成方法及组件的制造方法
- 申请号：TW105120094 申请日：2016-06-27
- 公开(公告)号：TW201706715A 公开(公告)日：2017-02-16
- 发明人： 北川浩隆 , KITAGAWA, HIROTAKA
- 申请人： 富士軟片股份有限公司 , FUJIFILM CORPORATION
- 专利权人： 富士軟片股份有限公司,FUJIFILM CORPORATION
- 当前专利权人： 富士軟片股份有限公司,FUJIFILM CORPORATION
- 代理人： 葉璟宗; 鄭婷文; 詹富閔
- 优先权： 2015-132094 20150630
- 主分类号： G03F7/028
- IPC分类号： G03F7/028 ; C08F220/18 ; C08F220/22 ; C08F220/20 ; B29C59/02 ; B29C59/16 ; H01L21/308
A photocurable composition which contains a monofunctional (meth)acrylate represented by general formula (I) and a photopolymerization initiator. In the formula, R1 represents a hydrogen atom or a methyl group; R2 represents an alkyl group which may be substituted by a fluorine atom; R3 represents a hydrogen atom, a linear alkyl group which may be substituted by a fluorine atom, or a branched alkyl group which may be substituted by a fluorine atom; each of R4-R8 independently represents a hydrogen atom, a halogen atom, a linear alkyl group having 1-4 carbon atoms or a branched alkyl group having 3 or 4 carbon atoms; the R2 and R3 moieties have 1-6 carbon atoms in total; and the R2 and R3 moieties or the R2 and R4 moieties may combine together to form a ring.