基本信息:
- 专利标题: 功率輸出產生系統與適用於週期性波形之方法
- 专利标题(英):A power output generation system and method that adapts to periodic waveform
- 专利标题(中):功率输出产生系统与适用于周期性波形之方法
- 申请号:TW104140734 申请日:2015-12-04
- 公开(公告)号:TW201631621A 公开(公告)日:2016-09-01
- 发明人: 費斯克二世 賴瑞 , FISK II, LARRY J. , 瑞德姆斯基 阿恩 , RADOMSKI, AARON T. , 史密卡 強納生 , SMYKA, JONATHAN
- 申请人: 萬機科技股份有限公司 , MKS INSTRUMENTS,INC.
- 专利权人: 萬機科技股份有限公司,MKS INSTRUMENTS,INC.
- 当前专利权人: 萬機科技股份有限公司,MKS INSTRUMENTS,INC.
- 代理人: 許世正
- 优先权: 62/087,290 20141204
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
公开/授权文献:
- TWI574296B 功率輸出產生系統與適用於週期性波形之方法 公开/授权日:2017-03-11