基本信息:
- 专利标题: 接合基板之切割方法
- 专利标题(英):Method for cutting of bonded substrate
- 申请号:TW104132440 申请日:2015-10-01
- 公开(公告)号:TW201619080A 公开(公告)日:2016-06-01
- 发明人: 崔東光 , CHIO, DONGKWANG
- 申请人: 三星鑽石工業股份有限公司 , MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD.
- 专利权人: 三星鑽石工業股份有限公司,MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD.
- 当前专利权人: 三星鑽石工業股份有限公司,MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD.
- 代理人: 陳長文
- 优先权: 10-2014-0134231 20141006
- 主分类号: C03B33/09
- IPC分类号: C03B33/09 ; C03B33/10 ; B23K26/38
The present invention relates to a method for cutting of bonded substrate, when the bonded substrate is under a scribing process, it can not only remove the useless and virtually disposed portion of the substrate formed with the tightly sealed portion to make it narrow to maximum limit, but also make the cutting surface smoothly carry out the cutting. The cutting method used on the bonded substrate (10) carrying out the cutting on the tightly sealed portion (8) formed in between the upper glass portion (11a) and the lower glass portion (11b) of the bonded substrate (10) comprises the following stages: irradiating laser towards the position of the tightly sealed portion (20) contacting to at least one of the upper glass portion (11a) and the lower glass portion (11b) to form the cutting lines (13a, 13b) on the inner surface side of at least one of the upper glass portion (11a) and the lower glass portion (11b); and utilizing the scribing wheel (70) to carry out the scribe line along the cutting lines (13a, 13b) towards at least one of the upper glass portion (11a) and the lower glass portion (11b), thereby having the efficacy in being able to form the elegant cutting surface.
公开/授权文献:
- TWI671267B 接合基板之切割方法 公开/授权日:2019-09-11