基本信息:
- 专利标题： 電源裝置
- 专利标题（英）：Power supply device
- 专利标题（中）：电源设备
- 申请号：TW103123297 申请日：2014-07-07
- 公开(公告)号：TW201517696A 公开(公告)日：2015-05-01
- 发明人： 田畑要一郎 , TABATA, YOICHIRO , 沖原雄二郎 , OKIHARA, YUJIRO , 中村紀幸 , NAKAMURA, NORIYUKI , 西村真一 , NISHIMURA, SHINICHI
- 申请人： 東芝三菱電機產業系統股份有限公司 , TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- 专利权人： 東芝三菱電機產業系統股份有限公司,TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- 当前专利权人： 東芝三菱電機產業系統股份有限公司,TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- 代理人： 洪武雄; 陳昭誠
- 优先权： PCT/JP2013/077033 20131004
- 主分类号： H05H1/46
- IPC分类号： H05H1/46 ; C01B13/11 ; H01L21/3065
The invention provides a power supply device which automatically determines a driving frequency of an inverter in a system including a plasma generating device and the power supply device. The power supply device (10) of this invention comprises: a resonance means (7) forming a resonance status between the power supply device and the plasma generating device, and a control unit (6) performing the operations as follows: the control unit (6) changes the frequency of the inverter and respectively obtains an output power factor of the inverter for each frequency of the inverter, when an input power value which is 100 % (or equal to or lower than 100% and equal to or higher than a threshold %) of a rated power is indicated. Then, the control unit determines the driving frequency of the inverter according to an inverter frequency, which has the maximum input power factor of the inverter.
公开/授权文献:
- TWI611736B 電源裝置 公开/授权日：2018-01-11