基本信息:
- 专利标题： 可調式濾光元件及其製作方法
- 专利标题（英）：Tunable filter element and manufacturing method thereof
- 专利标题（中）：可调式滤光组件及其制作方法
- 申请号：TW102134089 申请日：2013-09-23
- 公开(公告)号：TW201512634A 公开(公告)日：2015-04-01
- 发明人： 葉建南 , YEH, CHIEN NAN , 陳榮泰 , CHEN, LUNG TAI , 張金生 , CHANG, CHIN SHENG , 許仲毅 , HSU, CHUNG YI
- 申请人： 財團法人工業技術研究院 , INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 申请人地址： 新竹縣
- 专利权人： 財團法人工業技術研究院,INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人： 財團法人工業技術研究院,INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- 当前专利权人地址： 新竹縣
- 代理人： 詹銘文; 葉璟宗
- 主分类号： G01J3/28
- IPC分类号： G01J3/28 ; H01L31/02
A tunable filter element and manufacturing method thereof are provided. The tunable filter element includes a substrate layer, a supporting component, a first filter structure, a second filter structure, a first elastic unit, a second elastic unit, a first upper electrode, and a second upper electrode. The substrate layer includes a substrate, a first reflective film, a second reflective film, a first lower electrode, and a second lower electrode. When a same voltage applied between the first upper and the first lower electrode as well as between the second upper and the second lower electrode, the first filter structure and the second filter structure are drawn by a static attraction force to move toward the substrate respectively, so that there is a first distance between the first filter structure and the first reflective film, and there is a second distance between the second filter structure and the second reflective film.
公开/授权文献:
- TWI502176B 可調式濾光元件及其製作方法 公开/授权日：2015-10-01
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01J | 红外光、可见光、紫外光的强度、速度、光谱成分，偏振、相位或脉冲特性的测量；比色法；辐射高温测定法 |
| ------G01J3/00 | 光谱测定法；分光光度测定法；单色器；测定颜色 |
| --------G01J3/28 | .光谱测试 |