基本信息:
- 专利标题： 使用薄膜狀模具製作具有凹凸圖樣之基板的製造方法與製造裝置以及具有該基板之裝置的製造方法
- 专利标题（英）：Manufacturing method and manufacturing device for fabricating substrate having concave-convex pattern by using film-shaped mold, and manufacturing method for device provided with the substrate
- 专利标题（中）：使用薄膜状模具制作具有凹凸图样之基板的制造方法与制造设备以及具有该基板之设备的制造方法
- 申请号：TW102103257 申请日：2013-01-29
- 公开(公告)号：TW201349612A 公开(公告)日：2013-12-01
- 发明人： 烏山重隆 , 西村涼 , 小笹直人 , 熊谷吉弘 , 高橋麻登香
- 申请人： 吉坤日礦日石能源股份有限公司 , JX NIPPON OIL & ENERGY CORPORATION
- 专利权人： 吉坤日礦日石能源股份有限公司,JX NIPPON OIL & ENERGY CORPORATION
- 当前专利权人： 吉坤日礦日石能源股份有限公司,JX NIPPON OIL & ENERGY CORPORATION
- 代理人： 洪澄文
- 优先权： 2012-060925 20120316;2012-064140 20120321
- 主分类号： H01L51/50
- IPC分类号： H01L51/50 ; H01L51/56
A device manufacturing method of the present invention comprises: a substrate forming step P1, which forms a substrate with a concave-convex pattern by applying sol-gel material to the substrate to transfer a predetermined concave-convex pattern; a cleaning step P2, which cleans the substrate having the concave-convex pattern; a first electrode forming step P3, which forms a first electrode on the cleaned substrate by pattern formation; an annealing step P4, which anneals the substrate formed with the first electrode; a film forming step P5, which forms a film on the annealed substrate; and a second electrode forming step P6, which forms a second electrode on the film. Since the sol-gel material is used, the invention has durability during the device manufacturing process.
公开/授权文献:
- TWI596811B 使用薄膜狀模具製作具有凹凸圖樣之基板的製造方法與製造裝置以及具有該基板之裝置的製造方法 公开/授权日：2017-08-21