基本信息:
- 专利标题: 半導體單晶之製造方法
- 专利标题(英):Semiconductor single crystal production method
- 专利标题(中):半导体单晶之制造方法
- 申请号:TW100132317 申请日:2011-09-07
- 公开(公告)号:TW201311948A 公开(公告)日:2013-03-16
- 发明人: 櫻田隆 , SAKURADA, TAKASHI , 川瀬智博 , KAWASE, TOMOHIRO , 羽木良明 , HAGI, YOSHIAKI
- 申请人: 住友電氣工業股份有限公司 , SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 专利权人: 住友電氣工業股份有限公司,SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 当前专利权人: 住友電氣工業股份有限公司,SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 代理人: 陳長文
- 主分类号: C30B29/42
- IPC分类号: C30B29/42 ; C30B11/14
The present invention relates to a semiconductor crystal production method for producing a semiconductor crystal in which the occurrence of defects is suppressed. The production method comprises the following steps: forming a boron oxide film (31) on the inner wall of a growing container (10) that has a bottom section and a body section connected to the bottom section; bringing a silicon oxide-containing boron oxide melt (33) into contact with the boron oxide film (31) to form a silicon oxide-containing boron oxide film (32) on the inner wall of the growing container (10); forming a starting material melt (34) on a seed crystal (20) disposed on the bottom section within the growing container (10); and growing a semiconductor single crystal by solidifying the starting material melt (34) from the seed crystal (20) side.