发明专利
TW201214183A 用於自動驗證半導體製程製作方法之方法及設備 METHOD AND APPARATUS FOR AUTOMATED VALIDATION OF SEMICONDUCTOR PROCESS RECIPES
审中-公开
基本信息:
- 专利标题： 用於自動驗證半導體製程製作方法之方法及設備 METHOD AND APPARATUS FOR AUTOMATED VALIDATION OF SEMICONDUCTOR PROCESS RECIPES
- 专利标题（英）：Method and apparatus for automated validation of semiconductor process recipes
- 专利标题（中）：用于自动验证半导体制程制作方法之方法及设备 METHOD AND APPARATUS FOR AUTOMATED VALIDATION OF SEMICONDUCTOR PROCESS RECIPES
- 申请号：TW100128569 申请日：2011-08-10
- 公开(公告)号：TW201214183A 公开(公告)日：2012-04-01
- 发明人： 哈帝查理斯 , 林黎羅傑艾倫
- 申请人： 應用材料股份有限公司
- 申请人地址： APPLIED MATERIALS, INC. 美國 US
- 专利权人： 應用材料股份有限公司
- 当前专利权人： 應用材料股份有限公司
- 当前专利权人地址： APPLIED MATERIALS, INC. 美國 US
- 代理人： 蔡坤財; 李世章
- 优先权： 美國 61/378,561 20100831 美國 13/044,747 20110310
- 主分类号： G06F
- IPC分类号： G06F
Methods and apparatus for automated validation of semiconductor process steps are provided herein. In some examples, a method for validating a semiconductor process recipe includes: selecting a rule set describing an operating window for a semiconductor process tool; checking parameter values defined by steps in the semiconductor process recipe against limit-checking rules of the rule set to produce first results; determining step types from the steps in the semiconductor process recipe using step definition rules of the rule set to produce second results; checking transitions between the step types against step transition rules of the rule set to produce third results; and generating, using the computer, validation data for use of the semiconductor process recipe with the semiconductor process tool based on the first, the second, and the third results.
公开/授权文献:
- TWI479352B 用於自動驗證半導體製程製作方法之方法及設備 公开/授权日：2015-04-01