基本信息:
- 专利标题: 使用薄膜SOI之影像感測器 IMAGE SENSOR USING THIN-FILM SOI
- 专利标题(英):Image sensor using thin-film SOI
- 专利标题(中):使用薄膜SOI之影像传感器 IMAGE SENSOR USING THIN-FILM SOI
- 申请号:TW096134415 申请日:2007-09-13
- 公开(公告)号:TW200849574A 公开(公告)日:2008-12-16
- 发明人: 尼可法西包銳里 NICHOLAS FRANCIS BORRELLI , 米奇度納凡布來迪 MICHAEL DONOVAN BRADY , 雷諾李布特 RONALD LEE BURT , 卡夏普魯坦葛喀 KISHOR PURUSHOTTAM GADKAREE
- 申请人: 康寧公司 CORNING INCORPORATED
- 申请人地址: 美國
- 专利权人: 康寧公司 CORNING INCORPORATED
- 当前专利权人: 康寧公司 CORNING INCORPORATED
- 当前专利权人地址: 美國
- 代理人: 吳洛傑
- 优先权: 美國 11/520,958 20060914
- 主分类号: H01L
- IPC分类号: H01L
Systems and methods related to an image sensor of one or more embodiments include subjecting a donor semiconductor wafer to an ion implantation process to create an exfoliation layer of semiconductor film on the donor semiconductor wafer, forming an anodic bond between the exfoliation layer and an insulator substrate by means of electrolysis; separating the exfoliation layer from the donor semiconductor wafer to transfer the exfoliation layer to the insulator substrate; and creating a plurality of image sensor features proximate to the exfoliation layer. Forming the anodic bonding by electrolysis may include the application of heat, pressure and voltage to the insulator structure and the exfoliation layer attached to the donor semiconductor wafer. Image sensor devices include an insulator structure, a semiconductor film, an anodic bond between them, and a plurality of image sensor features. The semiconductor film preferably comprises an exfoliation layer of a substantially single-crystal donor semiconductor wafer.