基本信息:
- 专利标题: 脆性材料基板分割裝置及分割方法
- 专利标题(英):Device and method for cutting off substrate of fragile material
- 专利标题(中):脆性材料基板分割设备及分割方法
- 申请号:TW095119086 申请日:2006-05-30
- 公开(公告)号:TW200718662A 公开(公告)日:2007-05-16
- 发明人: 西雄毅 , 音田健司 , 井上修一 , 熊谷透
- 申请人: 三星鑽石工業股份有限公司 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTDL
- 申请人地址: 日本
- 专利权人: 三星鑽石工業股份有限公司 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTDL
- 当前专利权人: 三星鑽石工業股份有限公司 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTDL
- 当前专利权人地址: 日本
- 代理人: 桂齊恆; 閻啓泰
- 优先权: 日本 JP2005-187324 20050530
- 主分类号: C03B
- IPC分类号: C03B ; B28D
A method and a device for cutting off a substrate of fragile material which can prevent the substrate of fragile material from being damaged or contaminated through contact by preventing contact of divided surfaces in a break process for cutting off the substrate of fragile material continuously. The device for cutting off a substrate of fragile material comprises dividing means (112, 122) for exerting a pressing force to the vicinity of a scribe line S formed on a substrate G and cutting off the substrate G at the pressed portion, and a holding portion moving substantially in parallel with the scribe line S while holding the dividing means to cut off the substrate G continuously along the scribe line S. The holding portion is provided with divided surface separating means (113, 123) for pressing at least one part of the divided substrate G while clamping it, and moving the substrate G substantially in parallel with the major surface thereof and in such a direction that the opposing divided surfaces obtained by cutting off separate from each other.
公开/授权文献:
- TWI457302B 脆性材料基板分割裝置及分割方法 公开/授权日:2014-10-21