基本信息:
- 专利标题： 產生微結構的裝置與方法 DEVICE AND METHOD FOR PRODUCING MICROSTRUCTURES
- 专利标题（英）：Device and method for producing microstructures
- 专利标题（中）：产生微结构的设备与方法 DEVICE AND METHOD FOR PRODUCING MICROSTRUCTURES
- 申请号：TW094111430 申请日：2005-04-12
- 公开(公告)号：TW200534949A 公开(公告)日：2005-11-01
- 发明人： 海利希 歐斯登達普 OSTENDARP, HEINRICH
- 申请人： 岫特股份公司 SCHOTT AG
- 申请人地址： 德國
- 专利权人： 岫特股份公司 SCHOTT AG
- 当前专利权人： 岫特股份公司 SCHOTT AG
- 当前专利权人地址： 德國
- 代理人： 林鎰珠
- 优先权： 德國 10 2004 020 990.1 20040423 德國 20 2004 011 815.7 20040728
- 主分类号： B23Q
- IPC分类号： B23Q
The invention proposes a device and a method for producing microstructures with a spindle, which is adapted to be driven for rotation about its longitudinal axis and which is provided with a fixture for clamping a workpiece, having an actuator (30) provided with a fast drive (36), in particular a piezo drive, adapted to produce fast movement of a tool (32) in a direction substantially perpendicular to the workpiece surface, which actuator (30) can be positioned along a workpiece surface to be worked with the aid of an additional drive (24) adapted to produce a linear feed motion in a first direction, the fast drive (36) being coupled with the tool (32) via guide means (38) that allow feeding of the tool (32) in axial direction of the fast drive (36), against the action of a restoring force, and that is highly rigid in a plane perpendicular to that direction. The control technology used permits microstructures to be produced precisely and reproducibly utilizing the dynamic properties of the system.