基本信息:
- 专利标题: 光阻劑用含氟聚合物之製造方法
- 专利标题(英):Process for the production of photoresist fluoropolymer
- 专利标题(中):光阻剂用含氟聚合物之制造方法
- 申请号:TW093100926 申请日:2004-01-14
- 公开(公告)号:TW200417551A 公开(公告)日:2004-09-16
- 发明人: 荒木孝之 , 石川卓司 , 鳥海實
- 申请人: 大金工業股份有限公司 DAIKIN INDUSTRIES, LTD.
- 申请人地址: 日本
- 专利权人: 大金工業股份有限公司 DAIKIN INDUSTRIES, LTD.
- 当前专利权人: 大金工業股份有限公司 DAIKIN INDUSTRIES, LTD.
- 当前专利权人地址: 日本
- 代理人: 林志剛
- 优先权: 日本 2003-007683 20030115
- 主分类号: C08F
- IPC分类号: C08F
The invention provides a novel process for producing fluoropolymers, specifically, a process for producing photoresist fluoropolymers which are transparent to vacuum ultraviolet rays, particularly, F2 laser (157nm), and excellent in solubility in alkaline developers; and photoresist compositions containing the photoresist fluoropolymers. The process is a process for producing a resist fluoropolymer excellent in solubility in developers which comprises repeating units (M2)of alicyclic structure in the backbone chain and has in the polymer either acid-reactive groups (Y1) or groups (Y2) convertible into acid-reactive groups (Y1), characterized by radical-polymerizing a monomer mixture containing a monomer (m2) capable of imparting alicyclic structure to the backbone chain in the presence of both a radical polymerization initiator and a chain transfer agent represented by the general formula (1): R - (X)n (1), in which R is a C1-20 hydrocarbon group optionally containing an ether linkage in which part of the hydrogen atoms may be replaced by fluorine; X is at least one functional group selected from the group consisting of oxygen-containing functional groups and substituted and unsubstituted amino groups; and n is an integer of 1 to 4.
信息查询:
EspacenetIPC结构图谱:
C | 化学;冶金 |
--C08 | 有机高分子化合物;其制备或化学加工;以其为基料的组合物 |
----C08F | 仅用碳—碳不饱和键反应得到的高分子化合物 |