基本信息:
- 专利标题： 이송 롤러, 이송 장치 및 기판 처리 시스템
- 专利标题（英）：KR20180001805U - Transport roller, transport device and substrate treatment system
- 申请号：KR20170006193 申请日：2017-12-01
- 公开(公告)号：KR20180001805U 公开(公告)日：2018-06-18
- 优先权： DE202016106842 2016-12-08
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/67
摘要：
기판(2)을이송하기위해돌출부들(11)을표면(10)에배치한이송롤러(9, 18); 적어도하나의그러한이송롤러(9, 18)를가지는기판처리시스템(1)용이송장치(8); 이송장치(8) 및처리용액(4, 6)을담고있는처리용기(3, 5)를가지는, 특히기판(2)의한쪽면을습식화학적처리하기위한기판처리시스템(1).
摘要（英）：
A feed roller (9, 18) disposed in the protruding portion 11 on the surface 10 to transfer a substrate (2); Feeding device 8 for at least one such transport roller (9, 18) having a substrate processing system 1; A processing system (1) for the wet chemical treatment of one side of the transfer device 8 and the processing solution, particularly a substrate having a 4,6 treatment vessel (3,5) containing a (second).