基本信息:
- 专利标题: 플라즈마 저감 장치
- 专利标题(英):KR20180000936U - Plasma abatement
- 专利标题(中):等离子体消除
- 申请号:KR20170004992 申请日:2017-09-22
- 公开(公告)号:KR20180000936U 公开(公告)日:2018-04-04
- 优先权: GB201616286 2016-09-26
- 主分类号: B01D53/32
- IPC分类号: B01D53/32 ; H01J37/32
It discloses a plasma torch abatement device and method of manufacturing the same. Plasma torch abatement device is for the treatment of stream flowing out of the processing tool having a flow outlet, comprises a reaction chamber formed by the reaction chamber wall for receiving the flow and a plasma flow outlet and the reaction chamber wall outlet flow and plasma flow float comprises a composite structure having a Taehwa layer, and the passivation layer facing and that is formed of a passivating material, a composite structure having a base layer formed from a base material surrounding the passivating layer, a passivation material has a lower chemical reactivity than the substrate material for the flow and a plasma flow outlet. In this manner, there is provided a composite or multi-layer reaction chamber having the advantageous properties provided by both of the base layer and the passivation layer, the passivation layer has a greater resistance to flow to flow in and out of outlet, whereby thereby improving the life of the reaction chamber.