基本信息:
- 专利标题: 증발원 장치 및 증착 장치
- 专利标题(英):EVAPORATION SOURCE DEVICE AND VAPOR DEPOSITION APPARATUS
- 申请号:KR1020220010058 申请日:2022-01-24
- 公开(公告)号:KR102464807B1 公开(公告)日:2022-11-07
- 优先权: JPJP-P-2017-237438 2017-12-12
- 主分类号: C23C14/24
- IPC分类号: C23C14/24 ; C23C14/26 ; H10K99/00
Provided is an evaporation source device, suppressing temperature reduction and controlling a location of an aperture through which an evaporation material passes. The evaporation source device comprises: a container having the aperture in which the evaporation material is stored; a heating means heating the container; and a storage member storing the container and the heating means. The storage member includes a container support part, a side surface part, and a location determining part. The container support part is configured to support at least a portion of an outer side of a bottom portion of the container. The location determining part is installed to protrude from the side surface part in a rod shape or a plate shape with respect to the container.
公开/授权文献:
- KR1020220017446A 증발원 장치 및 증착 장치 公开/授权日:2022-02-11