基本信息:
- 专利标题： 진공 펌프들의 시스템에서의 펌핑 방법 및 진공 펌프들의 시스템
- 专利标题（英）：KR102223057B1 - Method of Pumping in A System of Vacuum Pumps And System of Vacuum Pumps
- 申请号：KR1020177002586 申请日：2014-06-27
- 公开(公告)号：KR102223057B1 公开(公告)日：2021-03-05
- 发明人： 뮬러디디에 , 라흐쉬장에릭 , 일쉐브테오도르
- 申请人： 아뜰리에 부쉬 에스.아.
- 申请人地址： Rue des Moissons, Zone Industrielle, CH-**** Chevenez, Switzerland
- 专利权人： 아뜰리에 부쉬 에스.아.
- 当前专利权人： 아뜰리에 부쉬 에스.아.
- 当前专利权人地址： Rue des Moissons, Zone Industrielle, CH-**** Chevenez, Switzerland
- 代理人： 리앤목특허법인
- 国际申请： PCT/EP2014/063725 2014-06-27
- 国际公布： WO2015197138 2015-12-30
- 主分类号： F04C25/02
- IPC分类号： F04C25/02 ; F04C28/02 ; F04C28/06 ; F04C23/00 ; F04C18/344
The pumping method and pumping system (SP, SPP) is: connected to the gas outlet orifice (4) and vacuum chamber (1) opened by a pipe (5) before exiting the gas outlet (8) of the pumping system (SP, SPP). Lubrication vane main vacuum pump 3 with gas inlet orifice 2, check valve 6 located in pipe 5 between gas outlet orifice 4 and gas outlet 8, and check valve 6 ) And connected in parallel with the Yunhwara vane auxiliary vacuum pump (7). The lubrication vane main vacuum pump 3 is operated to pump the gas contained in the vacuum chamber 1 through the gas outlet orifice 4; At the same time, while the lubricating vane main vacuum pump (3) pumps the gas contained in the vacuum chamber (1) and while the lubricating vane main vacuum pump (3) maintains the specified pressure in the vacuum chamber (1), the lubricating vane assists. The vacuum pump 7 is operated and continues to operate.
公开/授权文献:
- KR1020170028381A 진공 펌프들의 시스템에서의 펌핑 방법 및 진공 펌프들의 시스템 公开/授权日：2017-03-13
信息查询:
EspacenetIPC结构图谱:
| F | 机械工程；照明；加热；武器；爆破 |
| --F04 | 液体变容式机械；液体泵或弹性流体泵 |
| ----F04C | 旋转活塞或摆动活塞的液体变容式机械；旋转活塞或摆动活塞的变容式泵 |
| ------F04C25/00 | 适于特殊用途的弹性流体泵 |
| --------F04C25/02 | .用于产生高真空 |