基本信息:
- 专利标题： 누설용액 감지장치
- 专利标题（英）：Leak detection apparatus
- 申请号：KR1020200024097 申请日：2020-02-27
- 公开(公告)号：KR102205502B1 公开(公告)日：2021-01-20
- 发明人： 유홍근
- 申请人： (주)유민에쓰티
- 申请人地址： 경기도 안양시 만안구...
- 专利权人： (주)유민에쓰티
- 当前专利权人： (주)유민에쓰티
- 当前专利权人地址： 경기도 안양시 만안구...
- 代理人： 유미특허법인
- 主分类号： G01M3/16
- IPC分类号： G01M3/16 ; G01N27/06 ; C23C14/14
摘要：
본발명은누설용액감지장치에관한것으로, 베이스필름층의상부면에스퍼터링(sputtering) 방식에의해도전라인을형성함으로써균일한저항값을가지도록하며, 이러한스퍼터링방식에의해도전라인이 1㎛이하의두께를가지도록함으로써상부보호필름층이쉽게박리되지않도록하는데목적이있다. 또한, 서로다른금속에의해스퍼터링공정을진행함으로써도전라인의상부면에또 다른도전라인을적층하여형성하여다양한용액의누설을감지할수 있도록한다.
摘要（英）：
The present invention relates to a leak detection apparatus. The objective of the present invention is to form conductive lines on the upper surface of a base film layer by sputtering to have a uniform resistance value and prevent an upper protective film layer from being easily peeled off by making a conductive line have a thickness of 1 μm or less by such sputtering. In addition, by performing the sputtering process with different metals, another conductive line is stacked on the upper surface of the conductive line to sense leakage of various solutions.
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01M | 机器或结构部件的静或动平衡的测试；未列入其他类目的结构部件或设备的测试 |
| ------G01M3/00 | 结构部件的流体密封性的测试 |
| --------G01M3/02 | .应用流体或真空 |
| ----------G01M3/04 | ..通过在漏泄点检测流体的出现 |
| ------------G01M3/16 | ...应用电检测装置 |