Robot assembly allows for the remote actuation of a carriage supporting the robot. Robotic assembly includes a robot mounted on a track, a carriage movable along a track as possible, and the carriage. The robot includes at least a first arm, and a first arm coupled to the first driven (driven) member. Robot assembly further comprises a drive assembly having a first drive (driving) member, first drive member and the coupled to the first transmission member, and a first drive member coupled to the first driven piece first drive motor do. A first drive motor is adapted to cause a first by moving the drive member, remote rotation of the first driven member and the rotation of the first arm. The substrate processing apparatus and a substrate processing unit how to transport the substrate in a are also provided with a number of different aspects.