基本信息:
- 专利标题： 임프린트 마스터 템플릿 및 이의 제조 방법
- 专利标题（英）：KR20180018890A - Imprint master template and method of manufacturing the same
- 专利标题（中）：说明主模板和制造相同的方法
- 申请号：KR20160101479 申请日：2016-08-09
- 公开(公告)号：KR20180018890A 公开(公告)日：2018-02-22
- 发明人： HAN KANG SOO , AN MOON JUNG , JO GUG RAE , CHO HYUNG BIN
- 申请人： SAMSUNG DISPLAY CO LTD
- 专利权人： SAMSUNG DISPLAY CO LTD
- 当前专利权人： SAMSUNG DISPLAY CO LTD
- 优先权： KR20160101479 2016-08-09
- 主分类号： G03F7/00
- IPC分类号： G03F7/00 ; G03F9/00 ; H01L21/02 ; H01L21/027 ; H01L21/18 ; H01L21/304 ; H01L21/306 ; H01L21/56 ; H01L21/76 ; H01L21/78
Imprint master template comprises a first fine pattern units formed in a fine pattern in the upper surface, the first second fine pattern unit and the first fine pattern unit and the second microstructure adjacent to the fine pattern units, and having a fine pattern on the upper surface and a support for supporting the pattern units. The first side of the fine pattern units is seen facing the side of the second fine pattern unit. The side of the first fine pattern unit includes a first surface and the first surface and the predetermined angle of the inclined second face perpendicular to the upper surface. Said second side of said fine pattern unit includes a first surface and the first surface and the predetermined angle of the inclined second face perpendicular to the upper surface.