基本信息:
- 专利标题： 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
- 专利标题（英）：Catadioptric projection objective with intermediate images
- 专利标题（中）：反射折射投影物镜与中间图像
- 申请号：KR1020177005924 申请日：2005-05-13
- 公开(公告)号：KR1020170028451A 公开(公告)日：2017-03-13
- 发明人： 도독아우렐리안 , 울리히빌헬름 , 에플레알렉산더
- 申请人： 칼 짜이스 에스엠티 게엠베하
- 申请人地址： Rudolf-Eber-Strasse * ***** Oberkochen Germany
- 专利权人： 칼 짜이스 에스엠티 게엠베하
- 当前专利权人： 칼 짜이스 에스엠티 게엠베하
- 当前专利权人地址： Rudolf-Eber-Strasse * ***** Oberkochen Germany
- 代理人： 양영준; 안국찬
- 优先权： US60/571,533 2004-05-17
- 国际申请： PCT/EP2005/005250 2005-05-13
- 国际公布： WO2005111689 2005-11-24
- 主分类号： G02B13/00
- IPC分类号： G02B13/00 ; G03F7/20
The patterns arranged on the object plane of the projection objective lens as a catadioptric projection objective for imaging at an image plane of the projection objective lens, and the first objective part for imaging an object field to the actual first intermediate image, first by using the radiation from the objective lens section includes a third objective part for imaging the second real intermediate image on the image portion and the second objective lens, the image plane for generating a second real intermediate image. The second objective lens part is a catadioptric objective part with a concave mirror. A second mirror for deflecting a first kkeokeum kkeokeum mirror and the radiation from the kkeokeum mirror for deflecting the radiation from the object plane to the concave mirror to the image plane orientation direction is provided. The field lens of the phage creative refractive power is disposed in an area adjacent to the field of the first intermediate image between the first intermediate image and / or the first kkeokeum mirror and a concave mirror.
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G02 | 光学 |
| ----G02B | 光学元件、系统或仪器 |
| ------G02B13/00 | 为下述用途专门设计的光学物镜 |