基本信息:
- 专利标题: 진공 펌프들의 시스템에서의 펌핑 방법 및 진공 펌프들의 시스템
- 专利标题(英):Method of Pumping in A System of Vacuum Pumps And System of Vacuum Pumps
- 专利标题(中):真空泵系统抽真空方法及真空泵系统
- 申请号:KR1020177002586 申请日:2014-06-27
- 公开(公告)号:KR1020170028381A 公开(公告)日:2017-03-13
- 发明人: 뮬러디디에 , 라흐쉬장에릭 , 일쉐브테오도르
- 申请人: 아뜰리에 부쉬 에스.아.
- 申请人地址: Rue des Moissons, Zone Industrielle, CH-**** Chevenez, Switzerland
- 专利权人: 아뜰리에 부쉬 에스.아.
- 当前专利权人: 아뜰리에 부쉬 에스.아.
- 当前专利权人地址: Rue des Moissons, Zone Industrielle, CH-**** Chevenez, Switzerland
- 代理人: 리앤목특허법인
- 国际申请: PCT/EP2014/063725 2014-06-27
- 国际公布: WO2015197138 2015-12-30
- 主分类号: F04C25/02
- IPC分类号: F04C25/02 ; F04C28/02 ; F04C28/06 ; F04C23/00 ; F04C18/344
Pumping method and pump system (SP, SPP) is: attached to a pumping system (SP, SPP), the pipe (5) the gas outlet orifice (4) and the vacuum chamber 1 is opened to the before emerging into a gas outlet (8) of lubricating the vane having a gas inlet orifice (2) the main vacuum pump (3), a gas outlet orifice (4) and a gas outlet (8) of the check valve 6 and the check valve (6 located in the pipe 5 between ) yunhwa and connected in parallel referred to the vane comprises an auxiliary vacuum pump 7. Lubricating vane main vacuum pump 3 is operated to pump the gas contained within the vacuum chamber 1 through the gas outlet orifice (4); At the same time, while the lubricating vane main vacuum pump (3) for pumping the gases contained in the vacuum chamber (1) and / or lubricating the vane while it is a vacuum pump (3) maintaining a predetermined pressure in the vacuum chamber (1), lubricating auxiliary vane vacuum pump 7 is operated to maintain the operating state.
公开/授权文献:
- KR102223057B1 진공 펌프들의 시스템에서의 펌핑 방법 및 진공 펌프들의 시스템 公开/授权日:2021-03-05
信息查询:
EspacenetIPC结构图谱:
F | 机械工程;照明;加热;武器;爆破 |
--F04 | 液体变容式机械;液体泵或弹性流体泵 |
----F04C | 旋转活塞或摆动活塞的液体变容式机械;旋转活塞或摆动活塞的变容式泵 |
------F04C25/00 | 适于特殊用途的弹性流体泵 |
--------F04C25/02 | .用于产生高真空 |