基本信息:
- 专利标题： 인-시튜 스펙트럼 프로세스 모니터링
- 专利标题（英）：In-situ spectral process monitoring
- 专利标题（中）：- 现场光谱过程监控
- 申请号：KR1020160099614 申请日：2016-08-04
- 公开(公告)号：KR1020170017797A 公开(公告)日：2017-02-15
- 发明人： 캐칭,벤자민에프. , 본군텐,마크케이. , 흐루스카,커티스알. , 스미스,파울라 , 쿰스,폴지.
- 申请人： 비아비 솔루션즈 아이엔씨.
- 申请人地址： *** N. McCarthy Boulevard, Milpitas, California *****, U.S.A.
- 专利权人： 비아비 솔루션즈 아이엔씨.
- 当前专利权人： 비아비 솔루션즈 아이엔씨.
- 当前专利权人地址： *** N. McCarthy Boulevard, Milpitas, California *****, U.S.A.
- 代理人： 특허법인 남앤드남
- 优先权： US14/819,179 2015-08-05
- 主分类号： G01J3/02
- IPC分类号： G01J3/02 ; G01J3/12
Than the sample at the time just moved past the sensor of the process is a fixed position, the sensor can be improved is that when taking the form of a probe which moves while burnt up after the material flow in the manufacturing process, increase the accuracy of the process monitoring is. The probe comprises a light source through an outer housing and a housing window of a hermetic seal from the flowing material to transmit light onto the flow material. Spatially variable optical filter (SVF; spatially variable optical filter) is to capture the light returned from the flowing material, for transmission to the detector array, and separated, the captured light into a spectrum of configuration wave signal, a detector array It provides a power reading for each component wavelength signal.
公开/授权文献:
- KR101885183B1 인-시튜 스펙트럼 프로세스 모니터링 公开/授权日：2018-08-03
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01J | 红外光、可见光、紫外光的强度、速度、光谱成分，偏振、相位或脉冲特性的测量；比色法；辐射高温测定法 |
| ------G01J3/00 | 光谱测定法；分光光度测定法；单色器；测定颜色 |
| --------G01J3/02 | .零部件 |