基本信息:
- 专利标题： MEMS 장치 및 공정
- 专利标题（英）：Mems device and process
- 专利标题（中）：MEMS器件和工艺
- 申请号：KR1020157010650 申请日：2013-09-19
- 公开(公告)号：KR1020150060900A 公开(公告)日：2015-06-03
- 发明人： 젠킨스,콜린로버트 , 호엑스트라,쳐크 , 보이드,유안
- 申请人： 시러스 로직 인터내셔널 세미컨덕터 리미티드
- 申请人地址： *B Nightingale Way, Quartermile, Edinburgh, EH* *EG, United Kingdom
- 专利权人： 시러스 로직 인터내셔널 세미컨덕터 리미티드
- 当前专利权人： 시러스 로직 인터내셔널 세미컨덕터 리미티드
- 当前专利权人地址： *B Nightingale Way, Quartermile, Edinburgh, EH* *EG, United Kingdom
- 代理人： 양영준; 백만기; 정은진
- 优先权： GB12170114 2012-09-24; US61/704,824 2012-09-24; GB12203618 2012-11-12; US61/725,380 2012-11-12; GB13149646 2013-08-21; US13/974,797 2013-08-23
- 国际申请： PCT/GB2013/052458 2013-09-19
- 国际公布： WO2014045040 2014-03-27
- 主分类号： H04R19/00
- IPC分类号： H04R19/00 ; B81B3/00 ; B81C1/00
The present application relates to a process for forming such a MEMS transducer to provide a MEMS device, in particular an increase in robustness and elasticity MEMS capacitive transducers, and acoustic shock. This application describes a transducer structure having a flexible membrane 101 which is supported between a first volume 109 and second volume 110. Transducer structure wherein the first and second at least one variable vent structure (401) and wherein the variable vent structure includes at least one movable portion of the moving the moiety which is in communication with at least one of volume, It may be moved to in response to a pressure difference across it changes the size of the flow path through the vent structure. Variable vent may be formed through the membrane, the moveable portion may be a portion of the membrane defined by the one or more channels which may be deflected away from the surface of the membrane. Variable vent is preferably closed in a pressure difference between the normal range, but is opened in order to provide a more rapid equalization of the air above and below the membrane in a high pressure difference.
公开/授权文献:
- KR101959603B1 MEMS 장치 및 공정 公开/授权日：2019-03-18