基本信息:
- 专利标题： 기판 홀더 및 한 쌍의 기판 홀더
- 专利标题（英）：Substrate holder and pair of substrate holders
- 专利标题（中）：基板支架和基板支架对
- 申请号：KR1020147019345 申请日：2012-12-14
- 公开(公告)号：KR1020140107431A 公开(公告)日：2014-09-04
- 发明人： 마에다히데히로 , 스가야이사오 , 구라타나오히코 , 모리히로시
- 申请人： 가부시키가이샤 니콘
- 申请人地址： *-**-*, Konan, Minato-ku, Tokyo, Japan
- 专利权人： 가부시키가이샤 니콘
- 当前专利权人： 가부시키가이샤 니콘
- 当前专利权人地址： *-**-*, Konan, Minato-ku, Tokyo, Japan
- 代理人： 특허법인태평양
- 优先权： JPJP-P-2011-273554 2011-12-14
- 国际申请： PCT/JP2012/008001 2012-12-14
- 国际公布： WO2013088733 2013-06-20
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01L21/02
Holding a substrate, and a substrate holder to be heated at the time of bonding with other substrates overlapped with each other on the substrate, is provided on the mounting unit, and a mounting portion in which the substrate is mounted, placed at the supported portion, and a heating which is supported from the other member have portions and comprises suppressed to suppress the damage due to the resulting stresses due to the difference in thermal expansion amount of the supported portion unit, reduction unit, parts of absorbent to absorb the difference in thermal expansion between the mounting portion and the supported portion, the absorbent portion a substrate holder comprising a slit that allows the relative displacement of the mounting portion and the supported portion by the difference in thermal expansion amount.
公开/授权文献:
- KR102077351B1 기판 홀더 및 한 쌍의 기판 홀더 公开/授权日：2020-02-13