基本信息:
- 专利标题： 고 경도 저마찰 Ｃｒ―Ｔｉ―Ｂ―Ｎ 코팅 및 그 제조방법
- 专利标题（英）：HIGH HARDNESS AND LOW FRICTION Cr-Ti-B-N COATING AND MANUFACTURING METHOD THEREOF
- 专利标题（中）：高硬度和低摩擦CR-TI-B-N涂层及其制造方法
- 申请号：KR1020130014366 申请日：2013-02-08
- 公开(公告)号：KR1020140101120A 公开(公告)日：2014-08-19
- 发明人： 김광호 , 명희복 , 김두인
- 申请人： 부산대학교 산학협력단
- 申请人地址： Pusan National University, *, Busandaehak-ro **(yuksipsam)beon-gil, Geumjeong-gu, Busan, (***-***), Republic of Korea
- 专利权人： 부산대학교 산학협력단
- 当前专利权人： 부산대학교 산학협력단
- 当前专利权人地址： Pusan National University, *, Busandaehak-ro **(yuksipsam)beon-gil, Geumjeong-gu, Busan, (***-***), Republic of Korea
- 代理人： 주은희
- 主分类号： C23C14/35
- IPC分类号： C23C14/35 ; C23C14/06
摘要：
The present invention relates to a quaternary system coating having high-hardness and low-friction characteristics, thus applied to airplanes, conveying machinery, and other tools, and a method for manufacturing the same. Chromium is supplied as a Cr target through a magnetron sputtering using a DC pulse within a single chamber. Titanium and boron are supplied as TiB_2 through a high-voltage impulse magnetron sputtering. Nitrogen is supplied by injecting nitrogen gas inside the chamber. Thereby, when forming a coating film at approximately 200°C which is relatively a low temperature, a crystalline Cr-Ti-B-N coating film can be directly manufactured without any post process such as annealing.
摘要（中）：
本发明涉及一种具有高硬度和低摩擦特性的四元系涂层，其应用于飞机，输送机械和其它工具，以及其制造方法。 通过使用单个室内的DC脉冲的磁控溅射作为Cr靶提供铬。 钛和硼通过高压脉冲磁控溅射作为TiB_2提供。 通过在室内注入氮气来供给氮气。 因此，当形成相对较低温度的大约200℃的涂膜时，可以直接制造结晶Cr-Ti-B-N涂膜，而不需要任何后处理如退火。