基本信息:
- 专利标题： 광학면으로부터 오염층을 제거하는 방법, 세정 가스를 생성하는 방법 및 대응하는 세정 및 세정 가스 생성 장치들
- 专利标题（英）：Method for removing a contamination layer from an optical surface, method for generating a cleaning gas, and corresponding cleaning and cleaning gas generation arrangements
- 专利标题（中）：从光学表面去除污染层的方法，用于产生清洁气体的方法以及相应的清洁和清洁气体发生装置
- 申请号：KR1020147019528 申请日：2007-11-06
- 公开(公告)号：KR1020140097574A 公开(公告)日：2014-08-06
- 发明人： 스톰,아놀드 , 엠,디르크,하인리히 , 무어스,요한네스,후베르투스,요제피나 , 불쉬린,바스티안,테오도르 , 슈타인,토마스 , 테슬라이트,에드윈
- 申请人： 칼 짜이스 에스엠티 게엠베하 , 에이에스엠엘 네덜란드 비.브이.
- 申请人地址： Rudolf-Eber-Strasse * ***** Oberkochen Germany
- 专利权人： 칼 짜이스 에스엠티 게엠베하,에이에스엠엘 네덜란드 비.브이.
- 当前专利权人： 칼 짜이스 에스엠티 게엠베하,에이에스엠엘 네덜란드 비.브이.
- 当前专利权人地址： Rudolf-Eber-Strasse * ***** Oberkochen Germany
- 代理人： 한양특허법인
- 国际申请： PCT/EP2007/009593 2007-11-06
- 国际公布： WO2009059614 2009-05-14
- 主分类号： B08B7/00
- IPC分类号： B08B7/00
The present invention, preferably a method for removing the contaminated layer 15 from the optical surface (14a) of the reflective optical element by EUV- to contact a having a hydrogen atom, a cleaning gas and the contaminated layer (15), at least in part, as: monitor the contamination layer to generate a signal representing the thickness of the step, the contaminated layer (15) which faces the jet of the cleaning gas to remove material from the contaminated layer (15) on the contamination layer 15 using the signal representative of the thickness of the step and the contaminated layer (15) as a feedback signal to move the jet of the cleaning gases with respect to the optical surface (14a) and comprising the step of controlling the jet of the cleaning gas It relates to a method and a corresponding cleaning device (19 - 24). The invention also, as well as the corresponding cleaning gas generated by the device, to a method for the production of a jet of the cleaning gas.
信息查询:
EspacenetIPC结构图谱:
| B | 作业；运输 |
| --B08 | 清洁 |
| ----B08B | 一般清洁；一般污垢的防除 |
| ------B08B7/00 | 不包含在其他小类或本小类的其他组中的清洁方法 |