基本信息:
- 专利标题: 중공체 플라즈마 처리
- 专利标题(英):Plasma treatment of hollow bodies
- 专利标题(中):中空身体的等离子体治疗
- 申请号:KR1020147002420 申请日:2012-06-04
- 公开(公告)号:KR1020140053144A 公开(公告)日:2014-05-07
- 发明人: 네테스하임,스테판 , 코르첵,다리우츠
- 申请人: 렐리온 플라즈마 게엠베하
- 申请人地址: Weidener Strasse **, ***** Regensburg, Germany
- 专利权人: 렐리온 플라즈마 게엠베하
- 当前专利权人: 렐리온 플라즈마 게엠베하
- 当前专利权人地址: Weidener Strasse **, ***** Regensburg, Germany
- 代理人: 나승택
- 优先权: DE10 2011 107 8367 2011-07-01
- 国际申请: PCT/EP2012/060497 2012-06-04
- 国际公布: WO2013004440 2013-01-10
- 主分类号: C23C16/04
- IPC分类号: C23C16/04 ; C23C16/452 ; C23C16/515 ; H01J37/32
The present invention relates to an apparatus and method for plasma treatment of a hollow body. The present invention is suitable for the protective plasma treatment of the inner surface of the hollow body heat sensitive, such as in particular plastic bottles. Plasma treatment according to the invention may for example be composed of chemical activation, disinfection, cleaning, or coating. At least one hollow body, are disposed within the processing chamber for processing. The treatment chamber is at least one plasma source and the fluid connection (fluid connection). To the discharge device on the chamber generate a negative pressure within the treatment chamber relative to the plasma source allows the plasma to be diffused into the external plasma source and the processing chamber and the hollow body.