基本信息:
- 专利标题: 기판제조장치
- 专利标题(英):Substrate production device
- 专利标题(中):基板生产设备
- 申请号:KR1020147000799 申请日:2012-07-06
- 公开(公告)号:KR1020140024952A 公开(公告)日:2014-03-03
- 发明人: 나카모리야스히토 , 이소케이지 , 오카모토유지 , 시라이시타츠로 , 이치카와에이지 , 우츠미카즈하루
- 申请人: 스미도모쥬기가이고교 가부시키가이샤
- 申请人地址: *-*,Osaki *-chome Shinagawa-ku, Tokyo, Japan
- 专利权人: 스미도모쥬기가이고교 가부시키가이샤
- 当前专利权人: 스미도모쥬기가이고교 가부시키가이샤
- 当前专利权人地址: *-*,Osaki *-chome Shinagawa-ku, Tokyo, Japan
- 代理人: 방해철; 김용인
- 优先权: JPJP-P-2011-164872 2011-07-27; JPJP-P-2011-165856 2011-07-28; JPJP-P-2011-169831 2011-08-03; JPJP-P-2012-051971 2012-03-08
- 国际申请: PCT/JP2012/067273 2012-07-06
- 国际公布: WO2013015093 2013-01-31
- 主分类号: H05K3/28
- IPC分类号: H05K3/28 ; B05C5/00 ; B05C11/10 ; B05D1/26
The base substrate is supported in the coating stage. The nozzle unit is, not opposed to the substrate supported on the coating stage, and not towards the substrate from a plurality of nozzle holes and discharges a droplet of the thin film material. The thin film material is accumulated in the reservoir tank. Gyega supply, and supplies the thin-film material from the reservoir tank to the nozzle unit. A first heat source to heat the reservoir tank. A first temperature sensor measures the temperature of the reservoir tank. And heating at least one portion of the second heat source supply system. A second temperature sensor measures the temperature of the at least one position of the feed system. A temperature control device, the first temperature sensor and the on the basis of the measurement result of the second temperature sensor, the temperature of the thin film material in the reservoir tank and the temperature of the thin film material flowing through the feed system, to fall within the target range of temperature, a first It controls the heat source and the second heat source.
公开/授权文献:
- KR101535221B1 기판제조장치 公开/授权日:2015-07-08
信息查询:
EspacenetIPC结构图谱:
H | 电学 |
--H05 | 其他类目不包含的电技术 |
----H05K | 印刷电路;电设备的外壳或结构零部件;电气元件组件的制造 |
------H05K3/00 | 用于制造印刷电路的设备或方法 |
--------H05K3/02 | .其中将导电材料敷至绝缘支承物的表面上,而后再将其导电材料从不希望让电流通导或屏蔽的表面区域中去除的 |
----------H05K3/28 | ..涂加非金属保护层 |