基本信息:
- 专利标题： 마이크로 렌즈 어레이를 사용한 노광 장치 및 광학 부재
- 专利标题（英）：Exposure apparatus using microlens array therein, and optical member
- 专利标题（中）：曝光装置使用微阵列和光学构件
- 申请号：KR1020137008056 申请日：2011-07-26
- 公开(公告)号：KR1020140002620A 公开(公告)日：2014-01-08
- 发明人： 미즈무라,미찌노부 , 아라이,도시나리
- 申请人： 브이 테크놀로지 씨오. 엘티디
- 申请人地址： *** Godo-Cho, Hodogaya-Ku, Yokohama-shi, Kanagawa ***-**** (JP)
- 专利权人： 브이 테크놀로지 씨오. 엘티디
- 当前专利权人： 브이 테크놀로지 씨오. 엘티디
- 当前专利权人地址： *** Godo-Cho, Hodogaya-Ku, Yokohama-shi, Kanagawa ***-**** (JP)
- 代理人： 장수길; 박충범; 이중희
- 优先权： JPJP-P-2010-192861 2010-08-30
- 国际申请： PCT/JP2011/066994 2011-07-26
- 国际公布： WO2012029449 2012-03-08
- 主分类号： H01L21/027
- IPC分类号： H01L21/027 ; G02B3/00 ; G03F9/00
To prevent foreign matter from entering between the microlens array and the substrate, and to provide access over the substrate and an exposure apparatus and an optical member capable of preventing scratches caused by the foreign matter in the microlens. The microlens array 3, the plurality of microlenses (3a) formed on the upper side of the transparent substrate 1 is disposed, the microlens array 3 is joined to the mask 4 in the end face (6) . Mask 4, the alignment marks for the two sides of the micro-lens array (3) (base) 12 is and is bonded, the alignment the alignment mark (11 on the opposite side of the substrate 1 of a mark for 12 ) it is formed. Distance between the alignment marks for 12 and the substrate 1 is smaller than the spacing of the microlens array 3 and the substrate (1).
公开/授权文献:
- KR101862427B1 마이크로 렌즈 어레이를 사용한 노광 장치 및 광학 부재 公开/授权日：2018-05-29
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
| --------H01L21/02 | .半导体器件或其部件的制造或处理 |
| ----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |