基本信息:
- 专利标题： 초음파 트랜스듀서의 형성 방법 및 관련 장치
- 专利标题（英）：Method for forming an ultrasonic transducer, and associated apparatus
- 专利标题（中）：形成超声波传感器的方法及相关设备
- 申请号：KR1020137016966 申请日：2011-11-30
- 公开(公告)号：KR1020130128427A 公开(公告)日：2013-11-26
- 发明人： 다우쉬,데이비드 , 굿윈,스캇에이치.
- 申请人： 리써치 트라이앵글 인스티튜트
- 申请人地址： P.O.Box *****, **** Cornwallis Road, Research Triangle Park, North Carolina ***** US
- 专利权人： 리써치 트라이앵글 인스티튜트
- 当前专利权人： 리써치 트라이앵글 인스티튜트
- 当前专利权人地址： P.O.Box *****, **** Cornwallis Road, Research Triangle Park, North Carolina ***** US
- 代理人： 박영우
- 优先权： US61/419,552 2010-12-03
- 国际申请： PCT/US2011/062577 2011-11-30
- 国际公布： WO2012075106 2012-06-07
- 主分类号： B06B1/06
- IPC分类号： B06B1/06 ; G10K11/00 ; H01L41/04
The method for forming the piezoelectric ultrasonic transducer device having a first electrode deposited on the dielectric layer disposed on the primary substrate. The piezoelectric material is disposed between the first electrode and the second electrode to form a transducer unit. From which a portion of the first electrode are patterned at least the piezoelectric material so as to extend outward laterally. The primary substrate and the dielectric layer is etched to form a first via extending to a portion extending outward laterally of the first electrode, the first conductive material is deposited to substantially fill the first via the first It forms a part and the electrically conductive coupling by extending outwards to the side of the electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally separated from the first via. Related methods and apparatus are also provided.
信息查询:
EspacenetIPC结构图谱:
| B | 作业；运输 |
| --B06 | 一般机械振动的发生或传递 |
| ----B06B | 一般的机械振动的发生或传递 |
| ------B06B1/00 | 产生亚声频、声频或超声频的机械振动的过程或设备 |
| --------B06B1/02 | .利用电能 |
| ----------B06B1/06 | ..用压电效应或用电致伸缩工作的 |