基本信息:
- 专利标题： 이온 밀링 장치
- 专利标题（英）：Ion milling device
- 专利标题（中）：离子切割装置
- 申请号：KR1020137011419 申请日：2011-11-02
- 公开(公告)号：KR1020130077884A 公开(公告)日：2013-07-09
- 发明人： 이와야,도루 , 무또,히로부미 , 다까스,히사유끼 , 가미노,아쯔시 , 가네꼬,아사꼬
- 申请人： 가부시키가이샤 히다치 하이테크놀로지즈
- 申请人地址： **-**, NISHISHINBASHI *-CHOME, MINATO-KU, TOKYO JAPAN
- 专利权人： 가부시키가이샤 히다치 하이테크놀로지즈
- 当前专利权人： 가부시키가이샤 히다치 하이테크놀로지즈
- 当前专利权人地址： **-**, NISHISHINBASHI *-CHOME, MINATO-KU, TOKYO JAPAN
- 代理人： 장수길; 박충범; 이중희
- 优先权： JPJP-P-2010-248022 2010-11-05
- 国际申请： PCT/JP2011/075306 2011-11-02
- 国际公布： WO2012060416 2012-05-10
- 主分类号： H01J37/20
- IPC分类号： H01J37/20 ; H01J37/16 ; H01J37/30 ; H01J37/305
Ion-milling device of the present invention, disposed within the vacuum chamber 15 and the tilt stage 8 having parallel inclined to the first axis perpendicular to the ion beam axis, parallel to the second axis orthogonal to said first axis rotation axis and having inclined axis drive mechanism (9, 51) for the sample (3) rotation or inclined and, as state while inclining the inclined stage to incline the sample rotation or reciprocation of irradiating an ion beam, a non-said tilt stage with the box in an inclined state, and having a switch which makes it possible to switch the state of irradiating the ion beam to the sample and from the incline. Thereby, it was possible to realize the ion-milling device for the cross-section of the sample processed in the same processing plane with the vacuum chamber.
公开/授权文献:
- KR101470267B1 이온 밀링 장치 公开/授权日：2014-12-05