基本信息:
- 专利标题： 내부 유성 구동장치를 구비하는 멀티-웨이퍼 회전 디스크 반응기
- 专利标题（英）：Multi-wafer rotating disc reactor with inertial planetary drive
- 专利标题（中）：多波段旋转盘反应器与惯性行星传动
- 申请号：KR1020127032938 申请日：2011-06-07
- 公开(公告)号：KR1020130039737A 公开(公告)日：2013-04-22
- 发明人： 루스,토드,아서 , 파란지페,아지트,프라모드 , 셀라루,아드리안 , 스칸다리아토,조셰프 , 탕,퀸퓨
- 申请人： 비코 인스트루먼츠 인코포레이티드
- 申请人地址： * Terminal Drive, Plainview, NY *****, U.S.A.
- 专利权人： 비코 인스트루먼츠 인코포레이티드
- 当前专利权人： 비코 인스트루먼츠 인코포레이티드
- 当前专利权人地址： * Terminal Drive, Plainview, NY *****, U.S.A.
- 代理人： 특허법인 무한
- 优先权： US13/153,679 2011-06-06; US61/351,966 2010-06-07
- 国际申请： PCT/US2011/039441 2011-06-07
- 国际公布： WO2011156371 2011-12-15
- 主分类号： H01L21/687
- IPC分类号： H01L21/687 ; C23C16/458 ; H01L21/683
The wafer carriers and methods for moving wafers in the reactor. Wafer carrier 220 may include a platen 215 having a plurality of compartments and a plurality of wafer platform 210. The platen 215 is configured to rotate about a first axis. Each of the wafer platform (210) is coupled with one of the blocks is configured to rotate about the respective second axis for the individual compartment (770). The platen 215 and the wafer platform 210 rotates to different angular velocity to produce a planetary movement between them. The method may be for the first axis of rotation includes rotating the platen 215. The method includes a platen 215, carried on a plurality of wafer platform 210 wafer rotation each and a platen 215 and the other angular velocity to produce a planetary movement between them and about the individual second axis of rotation of the the step of handling the (200) further includes.
公开/授权文献:
- KR101456357B1 내부 유성 구동장치를 구비하는 멀티-웨이퍼 회전 디스크 반응기 公开/授权日：2014-11-03
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
| --------H01L21/67 | .专门适用于在制造或处理过程中处理半导体或电固体器件的装置；专门适合于在半导体或电固体器件或部件的制造或处理过程中处理晶片的装置 |
| ----------H01L21/683 | ..用于支承或夹紧的 |
| ------------H01L21/687 | ...使用机械装置的，例如卡盘、夹具或夹子 |