发明公开
KR20120114205A Coating apparatus having device for feeding transferring carrier used in substrate transferring unit of coating region
有权
基本信息:
- 专利标题： Coating apparatus having device for feeding transferring carrier used in substrate transferring unit of coating region
- 专利标题（中）：具有用于输送涂层运输基板输送装置的输送装置的涂装装置
- 申请号：KR20120101928 申请日：2012-09-14
- 公开(公告)号：KR20120114205A 公开(公告)日：2012-10-16
- 发明人： CHOI WOO HYUK , JUNG YUN SEUNG
- 申请人： NARAENANOTECH CORP
- 专利权人： NARAENANOTECH CORP
- 当前专利权人： NARAENANOTECH CORP
- 优先权： KR20120101928 2012-09-14
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; B05D1/26 ; B05D5/00 ; B65G49/06
摘要：
PURPOSE: A coating apparatus equipped with a feeding unit of a transfer carrier is provided to reduce an entire tack time by consecutively performing a spreading motion of a coating solution. CONSTITUTION: A first floating unit provides a loading area. A second floating unit provides a coating region. A third floating unit provides an unloading region. A substrate transfer apparatus(201) transfers a substrate from the coating region to the unloading region. A nozzle apparatus(278) spreads a coating solution on the substrate. The nozzle apparatus is mounted on a gantry. A transfer carrier transfers the substrate on the second floating unit. A substrate transfer unit comprises a feeding unit of the transfer carrier.
摘要（中）：
目的：提供一种配备有转印载体的进料单元的涂布装置，以通过连续地进行涂布溶液的扩展运动来减少整个粘着时间。 构成：第一个浮动单元提供一个装载区域。 第二浮动单元提供涂覆区域。 第三浮动单元提供卸载区域。 基板传送装置（201）将基板从涂覆区域传送到卸载区域。 喷嘴装置（278）将涂布液涂布在基板上。 喷嘴装置安装在台架上。 传送载体在第二浮动单元上传送基板。 基板转印单元包括转印托盘的进给单元。
公开/授权文献:
- KR101212817B1 코팅 영역의 기판 이송 유닛에 사용되는 이송 캐리어의 피딩 장치를 구비한 코팅 장치 公开/授权日：2012-12-14