基本信息:
- 专利标题： 구조화된 광학 요소 및 포커싱된 빔을 이용하는 레이저 패터닝
- 专利标题（英）：Laser patterning using a structured optical element and focused beam
- 专利标题（中）：使用结构化光学元件和聚焦光束的激光图案
- 申请号：KR1020127015886 申请日：2010-12-16
- 公开(公告)号：KR1020120103651A 公开(公告)日：2012-09-19
- 发明人： 아라이,앨런와이. , 요시노,후미요
- 申请人： 아이엠알에이 아메리카, 인코포레이티드.
- 申请人地址： **** Woodridge Avenue, Ann Arbor, MI *****
- 专利权人： 아이엠알에이 아메리카, 인코포레이티드.
- 当前专利权人： 아이엠알에이 아메리카, 인코포레이티드.
- 当前专利权人地址： **** Woodridge Avenue, Ann Arbor, MI *****
- 代理人： 양영준; 백만기
- 优先权： US61/289,724 2009-12-23
- 国际申请： PCT/US2010/060670 2010-12-16
- 国际公布： WO2011079006 2011-06-30
- 主分类号： B23K26/06
- IPC分类号： B23K26/06 ; B23K26/08
Various embodiments provide a laser patterning using a structured optical elements and the focusing beam. In some embodiments, the structured optical elements may be integrally formed on a single substrate. In some embodiments, a plurality of optical components in the light path can be combined to provide a desired pattern. In at least one embodiment, it is used in conjunction with the motion control of the motion, the motion control of the object and the laser beam projected onto a mask control of a projection mask to control the exposure of the object with respect to the laser output. In some embodiments, a projection mask is used to control the exposure of an object, a projection mask is capable of absorbing, scattering, reflection or attenuation of the laser output. In some embodiments, the projected mask may comprise an optical element for changing the optical power and the polarization of the laser beam that is transmitted across a region of the projection mask.