基本信息:
- 专利标题： 기판 컨테이너 보관 시스템
- 专利标题（英）：Substrate container storage system
- 专利标题（中）：基板容器存储系统
- 申请号：KR1020117030281 申请日：2010-05-14
- 公开(公告)号：KR1020120055493A 公开(公告)日：2012-05-31
- 发明人： 보노라안토니씨 , 고울드리챠드에이치 , 크롤락마이클
- 申请人： 크로씽 오토메이션, 인코포레이티드
- 申请人地址： ***** Bayside Parkway, Fremont, CA *****, The United States of America
- 专利权人： 크로씽 오토메이션, 인코포레이티드
- 当前专利权人： 크로씽 오토메이션, 인코포레이티드
- 当前专利权人地址： ***** Bayside Parkway, Fremont, CA *****, The United States of America
- 代理人： 김태홍
- 优先权： US61/216,570 2009-05-18
- 国际申请： PCT/US2010/035018 2010-05-14
- 国际公布： WO2010135202 2010-11-25
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; B65G49/07 ; B65G1/04 ; B66C17/06
The method for operating a storage system and storage system is disclosed. The storage system includes a storage system assembly disposed at a position higher than the height of which is used to load a substrate to be processed and unloading equipment. The storage system is stored locally in one or more containers of the substrate. The storage system assemblies each including a plurality of storage shelves and said plurality of storage shelves has a shelf plate having a recess for supporting the container shelf. Each of said plurality of storage shelves are coupled to the chain to allow lateral movement is further coupled to the rail to be able to be directed to one or more locations. The motor is coupled to the drive sprocket for moving the chain, each of said plurality of storage shelves are moved together along the rail in one or more positions. The rail has a linear section and at least a portion of a non-linear part of the section of the section are arranged in a loop.
公开/授权文献:
- KR101716524B1 기판 컨테이너 보관 시스템 公开/授权日：2017-03-14