基本信息:
- 专利标题： 튜닝가능한 ＭＥＭＳ 공진기
- 专利标题（英）：Tunable mems resonators
- 专利标题（中）：TUNABLE MEMS谐振器
- 申请号：KR1020127001461 申请日：2010-06-21
- 公开(公告)号：KR1020120039645A 公开(公告)日：2012-04-25
- 发明人： 박,상준
- 申请人： 퀄컴 인코포레이티드
- 申请人地址： **** Morehouse Drive, San Diego, CA *****-****, U.S.A.
- 专利权人： 퀄컴 인코포레이티드
- 当前专利权人： 퀄컴 인코포레이티드
- 当前专利权人地址： **** Morehouse Drive, San Diego, CA *****-****, U.S.A.
- 代理人： 특허법인아주
- 优先权： US12/488,404 2009-06-19
- 国际申请： PCT/US2010/039374 2010-06-21
- 国际公布： WO2010148405 2010-12-23
- 主分类号： H03H9/46
- IPC分类号： H03H9/46 ; H03H9/02 ; H01P1/219 ; H03H7/01
A tunable MEMS resonator that has a resonance frequency adjustable to handle a large signal is described. In one illustrative design example, tunable MEMS resonator is (i) a first portion (160) including a cavity portion 180 and the columnar portion 170; And (ii) in mesh with the first fit portion 160, a second portion including the movable plate 140 is located under the pole 170. Each portion may be covered with a metal layer (130, 190) on the side facing the other part. The movable plate 140 is moved mechanically by a DC voltage can change the resonant frequency of the MEMS resonator. The cavity section 180 may be a rectangular or circular shape, and may be filled with a dielectric material or may be empty, or. The columnar portion 170 is positioned in the center of the cavity 180. The movable plate 140 has (i) up through the anchor 144 is attached to the second portion acts as a cantilever or, (ii) up through the two anchors (146, 148) is attached to the second partial bridge as it can be operated.
公开/授权文献:
- KR101657696B1 튜닝가능한 ＭＥＭＳ 공진기 公开/授权日：2016-09-19
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H03 | 基本电子电路 |
| ----H03H | 阻抗网络，例如谐振电路；谐振器 |
| ------H03H9/00 | 包括机电或电声元件的网络，如谐振电路 |
| --------H03H9/46 | .滤波器 |