基本信息:
- 专利标题: 면발광 레이저 소자, 면발광 레이저 어레이, 광 주사 장치, 화상 형성 장치, 면발광 레이저 소자의 제조 방법
- 专利标题(英):Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element
- 专利标题(中):表面发射激光元件,表面发射激光阵列,光学扫描装置,图像形成装置以及制造表面发射激光元件的方法
- 申请号:KR1020117028816 申请日:2010-05-26
- 公开(公告)号:KR1020120014916A 公开(公告)日:2012-02-20
- 发明人: 히가시야스히로 , 하라사카가즈히로
- 申请人: 가부시키가이샤 리코
- 申请人地址: 일본 도쿄도 오다꾸 나가마고메 *쵸메 *-*
- 专利权人: 가부시키가이샤 리코
- 当前专利权人: 가부시키가이샤 리코
- 当前专利权人地址: 일본 도쿄도 오다꾸 나가마고메 *쵸메 *-*
- 代理人: 김태홍; 송승필
- 优先权: JPJP-P-2009-134907 2009-06-04; JPJP-P-2010-023994 2010-02-05
- 国际申请: PCT/JP2010/059296 2010-05-26
- 国际公布: WO2010140600 2010-12-09
- 主分类号: H01S5/183
- IPC分类号: H01S5/183 ; H04N1/04 ; G03G15/00
A high-reflectance section and a low manufacturing method of the surface emitting laser element including a light-emitting mesa structure with an emitting region including the reflection portion, to form a stacked body including a lower reflector, a resonator structural body, and an upper reflector on the substrate .; In that the upper surface of the stacked body, forming a first region; Forming a second region on the upper surface of the laminate, having the same size as the first area; By etching the first and second regions, respectively, to form a mesa structure for a light-emitting mesa structure and monitoring; A mesa structure for a light-emitting mesa structure and monitoring, and to form a confinement structure including the current passing-through region is surrounded by an oxide; And a step of measuring the size of the current passing-through region of the mesa structure for monitoring.