基本信息:
- 专利标题： 박막 증착용 마스크의 제조 방법
- 专利标题（英）：Manufacturing method of mask for depositing thin film on substrate
- 专利标题（中）：用于在基板上沉积薄膜的掩模的制造方法
- 申请号：KR1020100008016 申请日：2010-01-28
- 公开(公告)号：KR1020110088212A 公开(公告)日：2011-08-03
- 发明人： 이상신 , 고정우
- 申请人： 삼성모바일디스플레이주식회사
- 申请人地址： 경기도 용인시 기흥구 삼성*로 ** (농서동)
- 专利权人： 삼성모바일디스플레이주식회사
- 当前专利权人： 삼성모바일디스플레이주식회사
- 当前专利权人地址： 경기도 용인시 기흥구 삼성*로 ** (농서동)
- 代理人： 리앤목특허법인
- 主分类号： H01L51/56
- IPC分类号： H01L51/56 ; C23C14/04
摘要：
PURPOSE: A manufacturing method of a thin film deposition mask are provided to manufacture a mask in which deposition performance is excellent at low cost by being formed a declined part with laser machining in a side which faces an opening of a patterned portion of mask. CONSTITUTION: A raw material substrate(121) for mask is prepared. A pattern which has a plurality of openings is formed after eliminating a part of the substrate. A declined part(133a) is formed on the edge of the pattern which faces the opening by eliminating a part of the edge of the pattern using laser beam(177) which enters to fall an angle about the substrate.
摘要（中）：
目的：提供一种薄膜沉积掩模的制造方法，通过在与掩模的图案化部分的开口相对的一侧形成具有激光加工的下降部分，以低成本制造沉积性能优异的掩模。 构成：制备用于掩模的原料基板（121）。 在去除了基板的一部分之后形成具有多个开口的图案。 通过使用激光束（177）消除图案的边缘的一部分，形成在图案的面向开口的边缘上的倾斜部分（133a），该激光束（177）进入围绕基板的一角度。
公开/授权文献:
- KR101097331B1 박막 증착용 마스크의 제조 방법 公开/授权日：2011-12-23