基本信息:
- 专利标题: 비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및 분배 시스템
- 专利标题(英):Liner-based liquid storage and dispensing systems with empty detection capability
- 专利标题(中):基于液体的液体存储和分配系统具有空白检测能力
- 申请号:KR1020117010320 申请日:2006-04-25
- 公开(公告)号:KR1020110073551A 公开(公告)日:2011-06-29
- 发明人: 호비넨미나 , 킨저리존알 , 톰글렌엠 , 오도허티케빈티 , 미켈슨키르크 , 웨어도날드디 , 반부스키르크피터씨
- 申请人: 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 , 도쿄엘렉트론가부시키가이샤
- 申请人地址: 미국 코네티컷 ***** 댄버리 코머스 드라이브 *
- 专利权人: 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드,도쿄엘렉트론가부시키가이샤
- 当前专利权人: 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드,도쿄엘렉트론가부시키가이샤
- 当前专利权人地址: 미국 코네티컷 ***** 댄버리 코머스 드라이브 *
- 代理人: 신정건; 김태홍
- 优先权: US60/674,579 2005-04-25
- 国际申请: PCT/US2006/015964 2006-04-25
- 国际公布: WO2006116572 2006-11-02
- 主分类号: B01J14/00
- IPC分类号: B01J14/00 ; B01J4/02 ; B67D3/00
The present invention has the capability for the detection of that the accommodated liquid during the dispensing operation exhausted or empty, when close to the run out that, or almost empty state, for example, high purity liquid reaction used in the manufacture of microelectronic device products agents and chemical a fluid supply system for storage and dispensing of chemical reagents and compositions, such as mechanical polishing composition is disclosed. The supply package and the servo-hydraulic distributor pump to monitor the dispensed material in the middle, or dispenser chamber supplementary pressure transducer for monitoring the time from the distributor being supplemented by periodic schedule from the dispenser using the dispensed material to flow the material into a downstream tool there the fluid delivery system is described using a detection device including a blank.
公开/授权文献:
- KR101297004B1 비어 있음 검출 능력을 갖는 라이너 기반의 액체 저장 및 분배 시스템 公开/授权日:2013-08-14
信息查询:
EspacenetIPC结构图谱:
B | 作业;运输 |
--B01 | 一般的物理或化学的方法或装置 |
----B01J | 化学或物理方法,例如,催化作用、胶体化学;其有关设备 |
------B01J14/00 | 使液体与液体反应的一般化学方法;及其专用设备 |