基本信息:
- 专利标题: 마이크로파 플라즈마 냉각 방법 및 상기 방법을 이용한 화학 분자의 선택적 파괴 시스템
- 专利标题(英):Method for cooling microwave plasma and system for the selective destruction of chemical molecules using said method
- 专利标题(中):用于冷却微波等离子体的方法和使用方法选择性破坏化学分子的系统
- 申请号:KR1020107026506 申请日:2009-04-30
- 公开(公告)号:KR1020110021816A 公开(公告)日:2011-03-04
- 发明人: 게랭다니엘 , 라르껫크리스티앙 , 로스탱쟝-크리스토프 , 모아장미셸 , 무안느빠스깔 , 드페르뜨브루노 , 로랑발레르
- 申请人: 레르 리키드 쏘시에떼 아노님 뿌르 레뜌드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드
- 申请人地址: ** Quai D'Orsay ***** Paris, France
- 专利权人: 레르 리키드 쏘시에떼 아노님 뿌르 레뜌드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드
- 当前专利权人: 레르 리키드 쏘시에떼 아노님 뿌르 레뜌드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드
- 当前专利权人地址: ** Quai D'Orsay ***** Paris, France
- 代理人: 양영준; 전경석; 백만기
- 优先权: EP083052068 2008-05-28
- 国际申请: PCT/EP2009/055264 2009-04-30
- 国际公布: WO2009144110 2009-12-03
- 主分类号: H05H1/24
- IPC分类号: H05H1/24 ; H05H1/46
-2 내지 10
-4 의 마이크로파 흡수력(tanδ), 및 비열(Cp)
The present invention is a part of the microwave energy in the fluid mixture to produce a plasma to initiate the destruction of that, at least some chemical bonds of the fluid molecules in the interior of the cooling method of a plasma processing system, in particular for processing the mixture of gaseous fluids flowing in the dielectric tube to the level of the coupling means that is configured to transfer, especially including means for coupling the microwave power source to a mixture of a gaseous fluid, the dielectric tube is at least in part, by the coolant flowing in thermal contact with the outer wall of the tube to cool It is cooled. According to the invention, on the one hand, and the refrigerant flow in thermal contact with the dielectric tube dielectric tubes within the fluid or the fluid mixture flowing with the flow in the opposite direction, on the other hand, the coolant is linear alpha having a carbon chain of 10 or more carbon atoms - from a liquid carbon perfluoroalkyl having polyolefin and / or the dielectric constant (ε) of less than 2.5 10
-2 microwave absorption (tanδ) to 10
-4, and the specific heat (Cp) <0.6 g.cal/g.℃ comprises one or more oil selected.