基本信息:
- 专利标题: 태양전지용 웨이퍼 제조방법 및 그에 의해 제조된 웨이퍼
- 专利标题(英):Manufacturing method for solar cell wafer and solar cell produced thereby
- 专利标题(中):制造太阳能电池和太阳能电池的制造方法
- 申请号:KR1020070135113 申请日:2007-12-21
- 公开(公告)号:KR1020090067440A 公开(公告)日:2009-06-25
- 发明人: 김수연 , 이선우 , 배순석 , 박성문 , 김영훈
- 申请人: 주식회사 에스에프에이
- 申请人地址: 경기도 화성시 영천로 ** (영천동)
- 专利权人: 주식회사 에스에프에이
- 当前专利权人: 주식회사 에스에프에이
- 当前专利权人地址: 경기도 화성시 영천로 ** (영천동)
- 代理人: 권영규; 한지희; 윤재석
- 主分类号: H01L31/04
- IPC分类号: H01L31/04 ; H01L31/18
摘要:
A manufacturing method of a wafer for solar cell and a wafer manufactured thereby are provided to improve a wafer yield and quality by preventing defects such as scratches, cracks, and holes on a wafer. A preparation process is performed to prepare a raw polysilicon material(S101). An ingot growing process is performed to grow a silicon ingot by using the raw polysilicon material in order to manufacture a wafer for solar cell(S110). A wafer generating process is performed to generate by cutting the silicon ingot(S120). An edge-grinding process is performed to grind an edge part of the wafer(S130). A cleaning process is performed to clean the wafer(S140).
摘要(中):
提供太阳能电池用晶片及其制造的晶片的制造方法,以通过防止晶片上的划痕,裂纹和孔等缺陷来提高晶片的产量和质量。 进行准备工序以制备原料多晶硅材料(S101)。 通过使用原料多晶硅材料来生长硅锭,以制造太阳能电池晶片(S110)来进行晶锭生长工艺。 执行晶片生成处理以通过切割硅锭生成(S120)。 进行边缘研磨处理以研磨晶片的边缘部分(S130)。 执行清洁处理以清洁晶片(S140)。
公开/授权文献:
- KR100973187B1 태양전지용 웨이퍼 제조방법 및 그에 의해 제조된 웨이퍼 公开/授权日:2010-07-30