基本信息:
- 专利标题： 가요성 기판용 챔버 입구 또는 챔버 출구를 밀봉하기 위한 장치, 기판 처리 기구 및 이러한 장치를 조립하기 위한 방법
- 专利标题（英）：KR101869525B1 - A device for sealing a chamber inlet or a chamber outlet for a flexible substrate, substrate processing apparatus, and method for assembling such a device
- 申请号：KR1020127029226 申请日：2011-03-22
- 公开(公告)号：KR101869525B1 公开(公告)日：2018-06-22
- 发明人： 벤크,칼-하인리히 , 하커,폴커
- 申请人： 어플라이드 머티어리얼스, 인코포레이티드
- 申请人地址： **** Bowers Avenue, Santa Clara, CA *****, U.S.A.
- 专利权人： 어플라이드 머티어리얼스, 인코포레이티드
- 当前专利权人： 어플라이드 머티어리얼스, 인코포레이티드
- 当前专利权人地址： **** Bowers Avenue, Santa Clara, CA *****, U.S.A.
- 代理人： 특허법인 남앤드남
- 优先权： EP101592590 2010-04-07
- 国际申请： PCT/EP2011/054363 2011-03-22
- 国际公布： WO2011124467 2011-10-13
- 主分类号： F16K7/10
- IPC分类号： F16K7/10 ; C23C14/56 ; B29C37/00
The present disclosure is directed to a device 100 for sealing the chamber inlet (18) or the chamber outlet for the flexible substrate 16, the device is formed in the main body 104 has a sealing surface 108, the main body It is flexible and the substrate openings 106 configured to be traversed by the substrate, and an elastic tube 116 which faces the surface at least in part sealed with the elastic tube, having a connecting portion for connection to a gas supply 136, suitable for expansion and contraction during operation. In addition, the present disclosure relates to a method of assembling a device for sealing the chamber inlet, or chamber, an outlet for the flexible substrate 16, the method comprising: providing a main body 104 having a sealing surface 108, phase substrate opening 106 is configured to be traversed by the said flexible substrate is formed on the main body; The elastic tube 116 is at least partially inserted into the body and the elastic tube 116 so as to face the sealing surface 108, the elastic tube is adapted to expand and contract during operation has a connection step; And a step of connecting the connecting portion of the elastic tube to a gas supply 136.
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
| F | 机械工程；照明；加热；武器；爆破 |
| --F16 | 工程元件或部件；为产生和保持机器或设备的有效运行的一般措施；一般绝热 |
| ----F16K | 阀；龙头；旋塞；致动浮子；通风或充气装置 |
| ------F16K7/00 | 隔膜切断装置，如用元件变形来闭合通道，而元件不整个移动 |
| --------F16K7/10 | .带有充气元件 |