基本信息:
- 专利标题: 반도체 장치
- 专利标题(英):Semiconductor device
- 专利标题(中):半导体器件
- 申请号:KR1020170002372 申请日:2017-01-06
- 公开(公告)号:KR101745294B1 公开(公告)日:2017-06-08
- 发明人: 세키네시게노부
- 申请人: 유겐가이샤 나프라
- 申请人地址: *-**-* Higashi-Tateishi, Katsushika-Ku, Tokyo, Japan
- 专利权人: 유겐가이샤 나프라
- 当前专利权人: 유겐가이샤 나프라
- 当前专利权人地址: *-**-* Higashi-Tateishi, Katsushika-Ku, Tokyo, Japan
- 代理人: 강일우
- 优先权: JPJP-P-2016-027263 2016-02-16
- 主分类号: H01L23/29
- IPC分类号: H01L23/29 ; H01L23/367 ; H01L23/48 ; H01B3/12
摘要:
높은동작온도로동작해도내구성을확보할수 있고, 반도체소자의성능을충분히발휘하는데있어서유리한반도체장치를제공한다. 반도체장치는, 베이스(14)에지지된반도체소자(16)를밀봉하는밀봉층(20)을포함하여구성되어있다. 밀봉층(20)은, 다수의 nm 사이즈(1 μm 이하)의입경의 SiO로이루어지는절연성나노미립자(54)와, 이들절연성나노미립자(54)의주위를간극없이메우는비정질실리카(56)로이루어지는나노콤포짓구조로구성되어있다.
摘要(中):
本发明提供一种半导体装置,即使在高工作温度下工作,充分发挥半导体装置的性能,也能够确保耐久性。 半导体器件包括密封由基底14支撑的半导体元件16的密封层20。 密封层20由无定形二氧化硅(56)的填充周围的绝缘纳米粒子54的没有缝隙,所述多个纳米尺寸的粒径的由SiO的这些绝缘纳米粒子54(小于1μm) 和一个纳米复合结构。
摘要(英):
May operate at a high operating temperature it is possible to secure durability, according to maximize the performance of the semiconductor device provides a semiconductor device favorable. The semiconductor device is composed, including a sealing layer 20 for sealing the semiconductor element (16) supported on the base 14. The sealing layer 20, an insulating nano-particles 54 and the amorphous silica 56 bridge the without gaps around these insulating nano-particles 54 made of SiO
2 having a grain size of a number of nm size (less than 1 μm) It consists of a nano-structure formed of composite.
信息查询:
EspacenetIPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |
--------H01L23/02 | .容器;封接 |
----------H01L23/29 | ..按材料特点进行区分的 |