基本信息:
- 专利标题: GaAs 홀센서 칩 및 그 제조방법
- 专利标题(英):GaAs Hall Sensor Chip and Method for Manufacturing the Hall Sensor Chip
- 专利标题(中):GaAs GaAs霍尔传感器芯片及制造霍尔传感器芯片的方法
- 申请号:KR1020150095393 申请日:2015-07-03
- 公开(公告)号:KR101689362B1 公开(公告)日:2016-12-26
- 发明人: 전경인 , 이종화 , 조광철 , 김성우
- 申请人: 나노스 주식회사
- 申请人地址: 경기도 화성시 마도면 마도공단로*길 *
- 专利权人: 나노스 주식회사
- 当前专利权人: 나노스 주식회사
- 当前专利权人地址: 경기도 화성시 마도면 마도공단로*길 *
- 代理人: 나승택
- 主分类号: G01R33/07
- IPC分类号: G01R33/07 ; G01R33/06
The present invention relates to a process for preparing a GaAs Hall sensor chip and a GaAs Hall sensor chip, GaAs Hall sensor chip manufacturing method according to an embodiment of the present invention is epitaxially forming a channel layer, the spacer layer and the ohmic layer to the upper GaAs substrate in the order taxi eolcheung forming step; A patterning step to create the epitaxial eolcheung the cross pattern; Electrode forming step of forming the respective electrodes on the epitaxial eolcheung four upper end portions of the cross pattern; Recess etching step to remove all but the ohmic layer on the epitaxial eolcheung inner region where the electrode is not formed; And that after the recess etching step, except for the top surface of the electrode which can reduce the flicker noise of the epitaxial eolcheung are made up formed an insulating film forming step of forming an insulating film covering the GaAs substrate upper GaAs Hall sensor chip It characterized.
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01R | 测量电变量;测量磁变量(通过转换成电变量对任何种类的物理变量进行测量参见G01类名下的 |
------G01R33/00 | 测量磁变量的装置或仪器 |
--------G01R33/02 | .测量磁场或磁通量的方向或大小 |
----------G01R33/04 | ..应用磁通控制原理 |
------------G01R33/07 | ...霍耳效应器件 |