基本信息:
- 专利标题: 캡슐화 모듈, 캡슐화 모듈 제조 방법 및 이의 사용
- 专利标题(英):Encapsulation module, the encapsulation module manufacturing method and use thereof
- 专利标题(中):封装模块的生产和使用方法
- 申请号:KR1020097015059 申请日:2007-12-14
- 公开(公告)号:KR101548384B1 公开(公告)日:2015-08-28
- 发明人: 하르트만베른하르트 , 힐저로란트 , 꾸이스마헤이끼 , 또르껠리알띠
- 申请人: 콘티넨탈 테베스 아게 운트 코. 오하게 , 무라타 일렉트로닉스 오와이
- 申请人地址: 독일 데-***** 프랑크푸르트 암 마인 궤리케슈트라쎄 *
- 专利权人: 콘티넨탈 테베스 아게 운트 코. 오하게,무라타 일렉트로닉스 오와이
- 当前专利权人: 콘티넨탈 테베스 아게 운트 코. 오하게,무라타 일렉트로닉스 오와이
- 当前专利权人地址: 독일 데-***** 프랑크푸르트 암 마인 궤리케슈트라쎄 *
- 代理人: 특허법인코리아나
- 优先权: DE10 2007 060 9312 2007-12-14; DE1020060607945 2006-12-21
- 国际申请: PCT/EP2007/063975 2007-12-14
- 国际公布: WO2008077821 2008-07-03
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; B81B7/00
The invention encapsulation module (A) prepared and / or micro relates to a method of encapsulating a mechanical structure, the through contact (2), structuring the electronic connecting means, such as wires, contacts and / or electronic structure, at least one step and the in / or etching process especially in the doped silicon in electric conductivity is formed from the blank of the semiconductor material, formed of an electronic connection means through the process, the base 6 of the semiconductor material to be electron connection means are arranged and causing, electronic connection means is an electrical contact to at least one of then embedding material 9 is filled with a filling material and / or the semiconductor base 6 has an outer surface (7,8) of the electronic connecting means is encapsulated modules (a) a prescribed number of a method which is removed after the embedding, at least one of structured and / or a bank of at least one of the isolated material which is configured, each process through contact (2) during the formation of the electronic connecting means according to the etching process a semiconductor material so having formed in the base (6), which form a semiconductor electrode (3). The invention also relates to the use of the at least one through contact (2) and at least one semiconductor electrode 3 and the encapsulation module and / or a micro-mechanical structure, and these vehicles.
公开/授权文献:
- KR1020090105930A 캡슐화 모듈, 캡슐화 모듈 제조 방법 및 이의 사용 公开/授权日:2009-10-07
信息查询:
EspacenetIPC结构图谱:
B | 作业;运输 |
--B81 | 微观结构技术 |
----B81C | 专门适用于制造或处理微观结构的装置或系统的方法或设备 |
------B81C1/00 | 在基片内或其上制造或处理的装置或系统 |